EASY ACCESS LAMPHEAD

• Main Authors: SEREBRYANOV OLEG V, RANISH JOSEPH M
• Format: Patent
• Language: Chinese; English
• Published: 05.01.2018
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

Embodiments described herein generally relate to an improved power distribution assembly for a lamphead assembly used in a thermal processing chamber. In one embodiment, the lamphead assembly includesa plurality of lamps for thermal processing of semiconductor substrates, and a power distribution assembly having a plurality of openings, the power distribution assembly provides power to the plurality of lamps, and each opening is sized to allow passage of the lamp therethough. 本文所描述的实施方式大体涉及种用于热处理腔室中的灯头组件的改良的功率分配组件。在个实施方式中，灯头组件包括用于半导体基板的热处理的多个灯和具有多个开口的功率分配组件，所述功率分配组件向多个灯提供功率且各个开口被调整尺寸以允许灯从中通过。