Metallic titanium doped diamond-like film and preparing method thereof

• Main Authors: ZHU DEJU, CHEN LI, WU DESHENG
• Format: Patent
• Language: Chinese; English
• Published: 01.12.2017
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The invention provides a preparing method of a metallic titanium doped diamond-like film. The method comprises following steps that a titanium doped graphite target material is subject to magnetron sputtering in the mixed gas environment, and deposition on a substrate is carried out to obtain the metallic titanium doped diamond-like film; the mixed gas comprises hydrogen and argon. During preparing of the metallic titanium doped diamond-like film, Ti is ingeniously introduced, the wear-resisting performance of the film is greatly improved, and internal stress of the diamond-like carbon-based film production process is effectively reduced. Therefore, the prepared metallic titanium doped diamond-like film has the good optical property, hardness and wear resistance, the film can be suitable for devices with the requirements of optical and mechanical properties, meanwhile, good hydrophobicity is achieved, in addition, the preparing method is conveniently operated in the industrial production, and the even and sta