Discharge excited gas laser device

• Main Authors: KUROSU AKIHIKO, KAWAMATA FUMIO
• Format: Patent
• Language: Chinese; English
• Published: 26.09.2017
• Subjects: BASIC ELECTRIC ELEMENTS; BEARINGS; BLASTING; DEVICES USING STIMULATED EMISSION; ELECTRICITY; ELEMENTS OR CRANKSHAFT MECHANISMS; ENGINEERING ELEMENTS AND UNITS; FLEXIBLE SHAFTS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS; HEATING; LIGHTING; MECHANICAL ENGINEERING; ROTARY BODIES OTHER THAN GEARING ELEMENTS; SHAFTS; THERMAL INSULATION IN GENERAL; WEAPONS

This invention lowers costs. This discharge excited gas laser device may comprise: a laser chamber wherein a laser gas containing a halogen gas is sealed; a pair of discharge electrodes disposed to face each other inside the laser chamber; a fan disposed inside the laser chamber to make the laser gas flow between the pair of discharge electrodes; a motor for rotating the fan; a motor power source for supplying power to the motor; a magnetic shaft bearing whereby the rotation axis of the fan is levitated magnetically; a displacement sensor for detecting the position of the rotation axis through a can; and a control unit measuring the number of revolutions of the fan based on a detection signal from the displacement sensor, while controlling the motor power source in such a manner that the measured value of the number of revolutions reaches a target number of revolutions. 本发明实现低成本化。放电激励式气体激光装置可以具备：激光腔，在该激光腔中封入了含有卤素气体的激光气体；对放电电极，它们在所述激光腔内相互对置配置；风扇，其配置在所述激光腔内，使所述激光气体在所述对放电电极之间流动；电机，其使所述风扇旋转；电机电源，其对所述电机提供电力；磁轴承，其使