Scribing Apparatus And Scribing Method

• Main Authors: SEON GEUN KIM, HAN HYOUN CHOI, HUI DONG JANG, YOUNG CHEOL KIM, YONG WOO KANG, SUNG SOO YANG
• Format: Patent
• Language: Chinese; English
• Published: 26.09.2017
• Subjects: CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS; PRINTED CIRCUITS

A scribing apparatus according to an embodiment of the present invention includes: a scribing wheel for forming a scribing line on a substrate; a drive unit for moving the scribing wheel vertically with respect to the substrate to adjust a pressing force applied by the scribing wheel to the substrate; an imaging capturing unit for imaging the cut surface of the substrate after the scribing line is formed; and a control unit for measuring the shape of the cut surface from the image picked up by the image capturing unit and controlling the drive unit to change the pressing force of the scribing wheel when the shape of the cut surface is out of the reference range. 种根据本发明的示例性实施例的划片设备可包括：划片轮，其被构造为在基板上形成划片线；驱动单元，其垂直于基板移动划片轮，且调整将划片轮压靠在基板上的按压力；图像采集单元，图像采集单元采集在基板上形成划片线之后被切割的基板的切割表面的图像；以及控制单元，其基于由图像采集单元采集的图像来测量切割表面的形状，并且当切割表面的形状超出参考范围时，通过控制驱动单元来改变按压力。