Processing method for controlling full-band error of aspheric element

• Main Authors: XIE RUIQING, YUAN ZHIGANG, WANG JIAN, CHEN XIANHUA, ZHAO SHIJIE, XU QIAO, HOU JING, XU XI, ZHOU LIAN, JIN HUILIANG, DENG WENHUI, ZHONG BO
• Format: Patent
• Language: Chinese; English
• Published: 15.09.2017
• Subjects: DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS; GRINDING; MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; PERFORMING OPERATIONS; POLISHING; TRANSPORTING

The invention provides a processing method for controlling a full-band error of an aspheric element, and relates to the technical field of aspheric element processing. The processing method for controlling the full-band error of the aspheric element comprises the four steps of grinding forming, specifically, direct forming of the aspheric element is conducted through an ultra-precision grinding method, and meanwhile, a sub-surface defect is controlled at a lower level; shaping polishing, specifically, a high-stability and high-removal efficiency sub-aperture polishing technique is adopted to achieve quick shaping polishing of the aspheric element, so that the sub-surface defect is removed; correcting polishing, specifically, a high-stability sub-aperture polishing technique is adopted to quickly correct a low-frequency error of the aspheric element; and smoothing polishing, specifically, a smoothing polishing technique is adopted, in a state that the low-frequency error is not deteriorated, a high-frequency e