Pressure sensor

• Main Authors: DAISUKE MORIHARA, MITSUAKI DAIO, AKIHIRO OKUGAWA
• Format: Patent
• Language: Chinese; English
• Published: 12.09.2017
• Subjects: ELECTRICITY; MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TESTING

A pressure sensor is disclosed. The minimization and high precision are realized. The pressure sensor comprises a pressure sensor chip, wherein the pressure sensor chip comprises a film, a sensor part, which is arranged on the film and can generate an electric signal corresponding to the deformity of the film, an output terminal part, which outputs an electric signal from the sensor part to the exterior, and a detection part, which comprises a pressure benchmark chamber, the film, and the sensor part, the area in the semiconductor substrate other than the detection part is separated by a groove, the groove is communicated with an opening part arranged on a surface opposite to the surface provided with the film; and a circuit part, which carries out prescribed calculation on an electric signal output by the output terminal part of the pressure sensor chip. The film and the output terminal part are in a same plane. The output terminal part of the pressure sensor chip and the input terminal part of the circuit p