Detection device and method for judging and recording position of silicon wafers

• Main Authors: LIU ZHIFENG, WEN JUNWU, WANG BING, YANG CONGBIN, TAO WENXIU
• Format: Patent
• Language: Chinese; English
• Published: 05.09.2017
• Subjects: CHAMBERS PROVIDED WITH MANIPULATION DEVICES; HAND TOOLS; MANIPULATORS; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PERFORMING OPERATIONS; PHYSICS; PORTABLE POWER-DRIVEN TOOLS; TESTING; TRANSPORTING

The invention discloses a detection device and method for judging and recording the position of silicon wafers, and belongs to the technical field of semiconductor carrying equipment. According to the invention, slots of a silicon wafer box are arranged in a trapezoidal manner, the upper end of the...