Super junction terminal structure and preparation method thereof

• Main Authors: ZHANG GUANGYIN, ZHU YANGJUN
• Format: Patent
• Language: Chinese; English
• Published: 25.08.2017
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The invention relates to a super junction terminal structure and a preparation method thereof. A terminal super junction comprises a second conductivity type main junction, and a plurality of first conductivity type pillars and second conductivity type pillars distributed alternately. The width of the first conductivity type pillars gradually increases from the second conductivity type main junction to the edge direction of a terminal area. The outer circle of the second conductivity type main junction is provided with at least one second conductivity type field limiting ring. Each second conductivity type field limiting ring is on the top of one second conductivity type pillar in a first conductivity type epitaxial layer. A field plate is arranged on each second conductivity type field limiting ring, and the field plate covers the second conductivity type field limiting ring and a protective layer laterally above the second conductivity type field limiting ring. The protective layers are arranged on a first