Object lens detection device based on point spread function measurement

• Main Authors: ZHANG YUNHAI, TANG YUGUO, WEI TONGDA
• Format: Patent
• Language: Chinese; English
• Published: 01.08.2017
• Subjects: MEASURING; PHYSICS; TESTING; TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES; TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR

The invention provides an object lens detection device based on point spread function measurement. Direct three-dimensional imaging of a point spread function is performed by using the mode of scanning the focus of a measured object lens through gold nanoparticles. According to the object lens detection device, the problem of point spread function measurement of the large-numerical-aperture object lens can be solved so that quantitative measurement and assessment of the imaging quality of the large-numerical-aperture object lens can be realized. 本发明提供的基于点扩散函数测量的物镜检测装置，采用金纳米粒子扫描被测物镜焦点的方式对点扩散函数直接三维成像，该物镜检测装置可解决大数值孔径物镜点扩散函数测量的难题，实现对大数值孔径物镜成像质量的定量测量与评估。