Mobile device user interface for supporting service maintenance and tracking activities in semiconductor tool

• Main Authors: GOSSELIN SIMON, MORA MARCO, RAMNARINE RONALD, SHAH MUKESH, PATRICK ROGER, AHRENS BOB, HOVERSTEN KERWIN, NEWTON NEAL K, WONG VINCENT
• Format: Patent
• Language: Chinese; English
• Published: 31.05.2017
• Subjects: CALCULATING; COMPUTING; COUNTING; DATA PROCESSING SYSTEMS OR METHODS, SPECIALLY ADAPTED FORADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL, SUPERVISORYOR FORECASTING PURPOSES; PHYSICS; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE,COMMERCIAL, FINANCIAL, MANAGERIAL, SUPERVISORY OR FORECASTINGPURPOSES, NOT OTHERWISE PROVIDED FOR

The invention discloses a mobile device user interface for supporting service maintenance and tracking activities in a semiconductor tool. Integration of semiconductor tool maintenance operations on mobile devices enables technicians to more accurately perform semiconductor tool maintenance, and allows for more accurate collection and analysis of data so that maintenance procedures and resulting tool operations can be more repeatable, consistent and efficient. 将半导体工具维护操作集成到移动设备上，使技术人员能够更准确地执行半导体工具维护，并使得能够更精确地收集和分析数据，从而使维护程序和所得的工具操作可以更具可重复性、致性和高效性。