Alkali-soluble resin, photosensitive resin composition, and use thereof

• Main Authors: FUKATSU YUTA, KUZAWA MASAHIRO, IIDA HIROO
• Format: Patent
• Language: Chinese; English
• Published: 24.05.2017
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CHEMISTRY; CINEMATOGRAPHY; COMPOSITIONS BASED THEREON; COMPOSITIONS OF MACROMOLECULAR COMPOUNDS; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; METALLURGY; ORGANIC MACROMOLECULAR COMPOUNDS; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; THEIR PREPARATION OR CHEMICAL WORKING-UP; USE OF INORGANIC OR NON-MACROMOLECULAR ORGANIC SUBSTANCES ASCOMPOUNDING INGREDIENTS

This alkali-soluble resin comprises a copolymer dissolved in a solvent, the copolymer including a polymeric unit containing a carboxyl group based on an unsaturated carboxylic acid, etc. and a polymeric unit containing an alkoxysilyl group based on a monomer of formula (1) below. The solvent is a specific alcohol having a linear or branched chain alkyl group having 4 or 5 carbon atoms. The specific alcohol is preferably a primary alcohol with an alkyl group having 4 carbon atoms, and more preferably 1-butanol. X-(CH2)a-Si(OR)b(CH3)3-b (1) In formula (1), X is a vinyl group, styryl group, or (meth)acryloyl group, R is a methyl group or ethyl group, a is an integer of 0-3, and b is an integer of 1-3. 种碱溶性树脂，通过在溶剂中溶解共聚物而形成，该共聚物含有由不饱和羧酸等衍生的含羧基聚合单元和由下述式(1)表示的单体衍生的含烷氧基甲硅烷基聚合单元。溶剂包含具有烷基碳原子数为4或5个的直链或支链的特定的醇。作为特定的醇，优选烷基碳原子数为4个的伯醇，特别优选为1-丁醇。下述化学式(1)中的X为乙烯基、苯乙烯基或(甲基)丙烯酰基，R为甲基或乙基，a为0～3的整数，b为1～3的整数，X－(CH)－Si(OR)(CH)...(1)。