Optimizing method of electrical transport property of ultrathin lanthanum nickelate film

• Main Authors: NING XINGKUN, CHEN MINGJING, WANG SHUFANG, FU GUANGSHENG
• Format: Patent
• Language: Chinese; English
• Published: 24.05.2017
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The invention provides an optimizing method of the electrical transport property of an ultrathin lanthanum nickelate film. The method comprises following steps: firstly, an SrTiO3 substrate is subject to surface step treatment, and a substrate with the TiO2 surface step is obtained; secondly, a pulse laser method is adopted to deposit an LaAlO3 film on the substrate obtained in the first step, and two-dimensional electron gas appears in the LaAlO3/SrTiO3 interface; thirdly, the pulse laser method is adopted to deposit an ultrathin LaNiO3 film on the obtained LaAlO3/SrTiO3. According to the method, an acid solution is firstly adopted to enable the SrTiO3 substrate to be treated to be in the step state with the specific width, the LaNiO3 film is deposited on the substrate, a layer of two-dimensional electron gas is formed on the interface, finally, the LaNiO3 film is deposited finally, the obtained film has the low resistance rate, meanwhile, the electrical transport property o can be regulated and controlled t