Purification of chlorosilanes by means of distillation and adsorption

The invention relates to methods and devices for the distillation separation of a multi-component mixture containing dichlorosilane, trichlorosilane, silicon tetrachloride and at least one boron, phosphorus or arsenic-containing impurity, in order to separate the target product trichlorosilane in th...

Full description

Saved in:
Bibliographic Details
Main Authors AIGNER MAXIMILIAN, PAETZOLD UWE, PROCHASKA JAN
Format Patent
LanguageChinese
English
Published 19.04.2017
Subjects
CHEMISTRY
COMPOUNDS THEREOF
INORGANIC CHEMISTRY
METALLURGY
NON-METALLIC ELEMENTS
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
SEPARATION
TRANSPORTING
Online AccessGet full text

Cover

More Information
Summary:The invention relates to methods and devices for the distillation separation of a multi-component mixture containing dichlorosilane, trichlorosilane, silicon tetrachloride and at least one boron, phosphorus or arsenic-containing impurity, in order to separate the target product trichlorosilane in the purest form possible. Distillation columns are used with a modified separation wall technique and absorbers for separating the at least one boron, phosphorus or arsenic-containing impurity. 本发明涉及用于蒸馏分离多组分混合物的方法和装置，所述多组分混合物包含二氯甲硅烷、三氯甲硅烷、四氯化硅和至少种含硼、含磷或含砷杂质，该发明使用采用改良分隔壁技术和用于除去至少种含硼、含磷或含砷杂质的吸附器的蒸馏塔以最大可能的纯度除去目标产物三氯甲硅烷。
Bibliography:Application Number: CN201580045114