Fiber-based atomic force microscope probe and atomic force microscope system

• Main Authors: SUI QINGMEI, ZHANG FAYE, ZHANG LEI, JIANG MINGSHUN, CAO YUQIANG, CAO HONGYI
• Format: Patent
• Language: Chinese; English
• Published: 15.03.2017
• Subjects: APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]; MEASURING; PHYSICS; SCANNING-PROBE TECHNIQUES OR APPARATUS; TESTING

The invention relates to a fiber-based atomic force microscope probe and an atomic force microscope system. The fiber-based atomic force microscope probe comprises a probe pin and a micro cantilever beam; and the probe pin is arranged at one end of the micro cantilever beam arranged at one end of a fiber. A fiber F-P cavity is formed between the micro cantilever beam and one end surface of the fiber by a connecting arm. And the micro cantilever beam is used for sensing a change of a distance between the probe pin and a sample. When the length of the F-P cavity changes due to deformation of the micro cantilever beam, the reflected light intensity is modulated by the fiber F-P cavity. 本发明涉及种基于光纤的原子力显微镜探头及原子力显微镜系统，基于光纤的原子力显微镜探头包括探针和微悬臂梁，探针位于微悬臂梁的端，所述微悬臂梁位于光纤的端，微悬臂梁通过连接臂与光纤端面之间形成光纤F-P腔，微悬臂梁用来感应探针与样品之间距离的变化，当微悬臂梁发生形变引起所述光纤F-P腔的腔长发生变化时，反射光强度被光纤F-P腔所调制。