Substrate transfer robot end effector

• Main Authors: GREENBERG DANIEL, MORI GLEN, SANSONI STEVEN V, SUH SONG-MOON, BRODINE JEFFREY, AGARWAL PULKIT
• Format: Patent
• Language: Chinese; English
• Published: 08.03.2017
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

Embodiments of apparatus for supporting a substrate are disclosed herein. In some embodiments, an apparatus for supporting a substrate includes a support member; and a plurality of substrate contact elements protruding from the support member, wherein each of the plurality of substrate contact elements includes: a first contact surface to support a substrate when placed thereon; and a second contact surface extending from the first contact surface, wherein the second contact surface is adjacent a periphery of the substrate to prevent radial movement of the substrate, wherein the first contact surface is at a first angle with respect to the support member and the second contact surface is at a second angle with respect to the support member, and wherein the first angle is between about (3) degrees and (5) degrees. 于此公开用于支撑基板的装置的实施方式。在些实施方式中，用于支撑基板的装置包含：支撑构件；及多个基板接触元件，该多个基板接触元件由该支撑构件突出，其中该多个基板接触元件的每个包含：第接触表面，在基板放置于该第接触表面上时支撑该基板；及第二接触表面，该第二接触表面由该第接触表面延伸；其中该第二接触表面邻近该基板的周边以防止该基板的径向移动；其中该第接触表面相关于该支撑构件处于第角度，且该第二接触表面