Focused shock excitation device capable of exciting MEMS microstructure in water

• Main Authors: YU ZHEN, SHE DONGSHENG, LI KUN, SACHURONGGUI, YANG YILIU
• Format: Patent
• Language: Chinese; English
• Published: 22.02.2017
• Subjects: MICROSTRUCTURAL TECHNOLOGY; PERFORMING OPERATIONS; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS; TRANSPORTING

The invention discloses a focused shock excitation device capable of exciting an MEMS microstructure in water. The focused shock excitation device comprises a support and an ellipsoidal cavity which are arranged on a substrate, wherein the ellipsoidal cavity is formed by connecting an upper cavity and a lower cavity and an inner cavity of the ellipsoidal cavity forms more than half ellipsoid; a mounting seat is arranged in the lower cavity; two pin electrodes are arranged on the upper end of the mounting seat; the two pin electrodes are arranged on a cross section at a first focal point of the ellipsoid; a microstructure unit is arranged on the support through a manual tri-axial displacement table; the microstructure unit is arranged at a second focal point; the pin electrodes are respectively electrically connected to two electrodes of a high-voltage capacitor; a distance between pinpoints of the pin electrodes is smaller than a maximum air breakdown gap in water after the high-voltage capacitor is fully cha