Semiconductor device and manufacturing method thereof

The invention discloses a semiconductor device and a manufacturing method thereof. The manufacturing method can comprise the steps of patterning an array and a peripheral region according to a self-aligning quadruple patterning step, and providing a semiconductor device manufactured by combining the...

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Bibliographic Details
Main Authors HAN ZONGTING, XU MIAOZHI, HONG YUMIN
Format Patent
LanguageChinese
English
Published 18.01.2017
Subjects
ELECTRICITY
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Summary:The invention discloses a semiconductor device and a manufacturing method thereof. The manufacturing method can comprise the steps of patterning an array and a peripheral region according to a self-aligning quadruple patterning step, and providing a semiconductor device manufactured by combining the patterning step. 本发明公开了种半导体装置及其制造方法。方法可包括以自对准四重图案化步骤图案化阵列和周边区、并提供以此结合的图案化步骤制作而成的半导体装置。
Bibliography:Application Number: CN201510393301