Preparation method of laser SE battery
The invention provides a preparation method of a laser SE battery. The preparation method comprises the following steps: 1) using a diamond wire to cut a silicon wafer; 2) carrying out wool making; 3) carrying out blind hole drilling treatment on the wool surface of the silicon wafer uniformly in a...
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Main Authors | , , , , , |
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Format | Patent |
Language | Chinese English |
Published |
21.12.2016
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Subjects | |
Online Access | Get full text |
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Summary: | The invention provides a preparation method of a laser SE battery. The preparation method comprises the following steps: 1) using a diamond wire to cut a silicon wafer; 2) carrying out wool making; 3) carrying out blind hole drilling treatment on the wool surface of the silicon wafer uniformly in a laser dot manner; 4) smearing phosphorus ink on the surface of the silicon wafer in which blind holes are formed; 5) putting in a diffusion furnace, introducing a POCl3 mixture for 2 to 3 min at the temperature of 300 to 500 DEG C; 6) cooling, taking out the silicon wafer, smearing an organic solvent, and carrying out laser scanning on the surface of the silicon wafer; 7) etching; and 8) carrying out anti-reflective film coating and silk-screen printing on the surface of the silicon wafer after etching, and completing sintering of front grid lines and a back aluminum back field. The laser SE battery prepared by adopting diffusion of the diffusion furnace after laser spot and laser scanning of the smeared organic so |
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Bibliography: | Application Number: CN20161756795 |