Laser annealing apparatus and a method for manufacturing a display apparatus using the laser annealing apparatus

• Main Authors: HYUNJIN CHO, BYOUNGHO CHEONG, JOOWOAN CHO, JEONGKYUN NA, SEUNGHWAN LEE, OLEG PRUDNIKOV, SANGHOON AHN, BYOUNGKWON CHOO
• Format: Patent
• Language: Chinese; English
• Published: 07.12.2016
• Subjects: AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR; BASIC ELECTRIC ELEMENTS; CHEMISTRY; CLADDING OR PLATING BY SOLDERING OR WELDING; CRYSTAL GROWTH; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR; METALLURGY; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PERFORMING OPERATIONS; PHYSICS; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; REFINING BY ZONE-MELTING OF MATERIAL; SEMICONDUCTOR DEVICES; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; SINGLE-CRYSTAL-GROWTH; SOLDERING OR UNSOLDERING; TRANSPORTING; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; WELDING; WORKING BY LASER BEAM

The invention provides a laser annealing apparatus and a method for manufacturing a display apparatus using the laser annealing apparatus. The laser annealing apparatus includes a first laser beam emitting unit, a first splitting unit, a first polarization unit, and a combination unit. The first laser beam emitting unit emits a first laser beam. The first splitting unit splits the first laser beam emitted from the first laser emitting unit into a first master beam in a first polarization state and a second master beam in a second polarization state. The first polarization unit outputs a third master beam having the second polarization state and corresponding to the first master beam by changing the first polarization state of the first master beam to the second polarization state. The combination unit combines the second master beam and the third master beam with each other. 提供了种激光束退火装置和使用激光束退火装置制造显示装置的方法。种激光束退火装置包括第激光束发射单元、第分离单元、第偏振单元和合并单元。第激光束发射单元发射第激光束。第分离单元将从第激光束发射单元发射的第激光束分离成处于第偏振态的第主光束和处于第二偏振态的第二主光束。第偏振