Connecting wire

• Main Authors: MIMURA YASUHIRO, NAKAJIMA KAZUYA, KUBOTA TOMOFUMI, MIYAMOTO KAZUSHIGE, NAKATAKE YASUHIRO
• Format: Patent
• Language: Chinese; English
• Published: 23.11.2016
• Subjects: ADVERTISING; CRYPTOGRAPHY; DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; DISPLAY; DISPLAYING; EDUCATION; FREQUENCY-CHANGING; LABELS OR NAME-PLATES; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL LOGIC ELEMENTS; OPTICS; PHYSICS; SEALS; SIGNS; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF

Provided is a connecting wire that ensures the reliability thereof by protecting against water intrusion while preventing a leak between connecting wires. A position corresponding to the pattern edge of an organic insulating layer (70) between connecting wires (50) adjacent to each other is overexposed using a mask shaped like a sharply pointed projection pattern (55a). Thereby, the organic insulating layer (70) slopes gently between the connecting wires (50), thus preventing the film thickness of a resist along the edge line of the organic insulating layer (70) from becoming large when forming the connection wires (50). As a result, this prevents a resist from creating a connection and remaining in a region between the connecting wires (50) adjacent to each other, and therefore prevents a leak between the connecting wires adjacent to each other. 本发明提供能够通过防止连接配线间的漏电并且防止水分的侵入来确保可靠性的连接配线。使用在与相邻的连接配线(50)之间的有机绝缘膜(70)的图案边缘对应的位置具有前端尖的突起图案(55a)的形状的掩模进行过曝光。由此，由连接配线(50)夹着的有机绝缘膜(70)的斜面的倾斜变得平缓，因此，在形成连接配线(50)时，抗蚀剂的膜厚沿着有机