Secondary electron spectrum testing device and testing method of medium material

• Main Authors: WENG MING, LIU WAN, LI YONGDONG, CAO MENG, ZHANG XIUSHENG, WANG FANG
• Format: Patent
• Language: Chinese; English
• Published: 09.11.2016
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

The invention provides a secondary electron spectrum testing device and a testing method of a medium material. The secondary electron spectrum testing device comprises a pulse electron gun, a cylindrical collecting electrode, a net-shaped grid, a sample and a metal sample tray which are arranged in a high-vacuum system, wherein a round hole is formed in the cylindrical collecting electrode; an incident electron beam emitted from the pulse electron gun penetrates through the round hole in the cylindrical collecting electrode and the net-shaped grid and vertically radiates to the sample; the net-shaped grid is connected with an oscilloscope; the sample is tightly adhered to the metal sample tray below and is grounded through a resistor R1; the bias voltage of a collector is set as zero; the net-shaped grid is connected with an external power supply through a switch Kg; the net-shaped grid is supplied with negative bias voltage; the charge on the surface of the sample is neutralized by using a method of adding n