BEAM SHAPING MASK, LASER PROCESSING DEVICE, AND LASER PROCESSING METHOD

• Main Author: MIZUMURA MICHINOBU
• Format: Patent
• Language: Chinese; English
• Published: 28.09.2016
• Subjects: CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR; PERFORMING OPERATIONS; SOLDERING OR UNSOLDERING; TRANSPORTING; WELDING; WORKING BY LASER BEAM

A beam shaping mask (1) having apertures (4) similar in shape to that of an aperture pattern (20) formed by laser processing a film (15), wherein the apertures (4) are formed such that the optical transmittance within the apertures (4) gradually decreases from the center toward the edges of the apertures, and such that the optical transmittance at the edges of the apertures is capable of ensuring at least the minimal laser intensity capable of laser processing the film (15). Thus, it is possible to prevent burrs (22) from being generated at the edges of the holes after laser processing is performed. 本发明涉及光束整形掩模、激光加工装置以及激光加工方法。其为具有与被激光加工于薄膜(15)的开口图案(20)的形状相似的形状的开口(4)的光束整形掩模(1)，开口(4)被形成为该开口(4)内的光透射率从中央部向周缘部递减、并且即使在周缘部也具有能够确保能够激光加工薄膜(15)的至少最低限度的激光强度的光透射率，从而防止在激光加工后的孔的边缘部产生毛刺(22)。