Process And Structures For Fabrication Of Solar Cells

Contact holes of solar cells are formed by laser ablation to accommodate various solar cell designs. Use of a laser to form the contact holes is facilitated by replacing films formed on the diffusion regions with a film that has substantially uniform thickness. Contact holes may be formed to deep di...

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Bibliographic Details
Main Authors SMITH DAVID D, HARLEY GABRIEL, COUSINS PETER JOHN, WALDHAUER ANN, KIM TAESEOK, DENNIS TIM
Format Patent
LanguageChinese
English
Published 24.08.2016
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:Contact holes of solar cells are formed by laser ablation to accommodate various solar cell designs. Use of a laser to form the contact holes is facilitated by replacing films formed on the diffusion regions with a film that has substantially uniform thickness. Contact holes may be formed to deep diffusion regions to increase the laser ablation process margins. The laser configuration may be tailored to form contact holes through dielectric films of varying thicknesses. 通过激光烧蚀形成太阳能电池(420)的接触孔，以适应多种太阳能电池设计。通过用具有大体均匀厚度的膜(424)替换形成于所述扩散区上的膜，从而有利于使用激光形成所述接触孔。接触孔可形成到深扩散区，以增大所述激光烧蚀方法裕度。可调整所述激光配置以形成穿过不同厚度的介质膜的接触孔。
Bibliography:Application Number: CN201610220531