Determination method of Young's elastic modulus of thin film

• Main Authors: Lian Yongsheng, Cai Zhenhong, Xie Xiaojun, Zheng Zhoulian, Sun Junyi, Yang Zhixin, He Xiaoting
• Format: Patent
• Language: Chinese; English
• Published: 24.08.2016
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

The invention discloses a determination method of Young's elastic modulus of a thin film. The method comprises the steps that a clamping device of which the internal radius is a is adopted for fixedly clamping a thin film of which the thickness is h, and the Poisson's ratio is v, and a circular thin film of which the radius is a, and the periphery is fixedly clamped is formed; loads q are applied and uniformly distributed in the transverse direction of the circular thin film, and the Young's elastic modulus E of the thin film can be obtained on the basis of accurate analysis of the static equilibrium problem of the axisymmetric circular thin film by means of the maximum deflection measured value w of the circular thin film. According to the determination method of the Young's elastic modulus of the thin film, a thin-film small rotation angle assumption is thoroughly abandoned, and therefore the influence of a thin-film rotation angle theta on a calculation error is thoroughly eliminated; meanwhile, the limiti