Fiber array line generator

• Main Authors: KEDLAYA DIWAKAR N, HUNTER AARON MUIR, MOFFITT THEODORE P, HOWELLS SAMUEL C, HOLMGREN DOUGLAS E
• Format: Patent
• Language: Chinese; English
• Published: 27.07.2016
• Subjects: BASIC ELECTRIC ELEMENTS; DEVICES USING STIMULATED EMISSION; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

Embodiments described herein relate to the rapid thermal processing of substrates. A fiber coupled laser diode array is provided in an optical system configured to generate a uniform irradiance pattern on the surface of a substrate. A plurality of individually controllable laser diodes are optically coupled via a plurality of fibers to one or more lenses. The fiber coupled laser diode array generates a Gaussian radiation profile which is defocused by the lenses to generate a uniform intensity image. In one embodiment, a field stop is disposed within the optical system. 在此所描述的具体实施方式涉及基板的快速热处理。光纤耦合激光二极管阵列设置于光学系统中，所述光学系统经配置以在基板表面上产生均匀辐照图案。多个单独可控的激光二极管经由多个光纤而与个或多个透镜光学耦接。所述光纤耦合激光二极管阵列产生高斯辐射分布，所述高斯辐射分布经透镜散焦而产生均匀强度图像。在个具体实施方式中，场光阑设置于所述光学系统内。