Optical scanner apparatus and optical scanner control apparatus

• Main Authors: TANAKA TOYOKI, SEKINE HISAMICHI, TAKAHASHI SOMEI, AGA HISANORI, HIBIYA RIICHIRO
• Format: Patent
• Language: Chinese; English
• Published: 22.06.2016
• Subjects: OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS

An optical scanner apparatus includes first and second torsion beams which support a mirror support portion supporting a mirror from both sides in an axial direction; first and second horizontal driving beams configured to include first and second horizontal driving sources, respectively, a connecting beam; a first piezo-electric sensor; first and second sensor interconnects connected to one of and the other of an upper electrode and a lower electrode of the first piezo-electric sensor, respectively, the first sensor interconnect and the second sensor interconnect being formed to extend toward the first horizontal driving beam and the second horizontal driving beam, respectively. 本发明提供能够减少传感器配线的干扰，高精度地检测反射镜的倾斜的光扫描装置及光扫描控制装置。该光扫描装置具有：以夹着反射镜及反射镜支撑部的方式成对设置的第一驱动梁；将第一驱动梁的一侧与扭转梁连结的连结梁；以及第一压电传感器，其形成在连结梁上，当在第一驱动梁上施加驱动电压而使上述反射镜摆动时，检测由扭转梁的绕轴的摆动引起的连结梁的位移，第一压电传感器机构将上部电极配线向夹着反射镜及反射镜支撑部的一方的第一驱动梁引出，将下部电极配线向夹着反射镜及反射镜支撑部的另一方的第一驱动梁引出。