Manufacturing method of porous silicon based copper oxide composite structural gas sensors applied at room temperature

• Main Authors: WANG YIFEI, HU MING, WANG ZISHUAI, LIU XIANGCHENG, YUAN LIN
• Format: Patent
• Language: Chinese; English
• Published: 15.06.2016
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

The invention discloses a manufacturing method of porous silicon based copper oxide composite structural gas sensors applied at room temperature.Particularly, ordered porous silicon and copper oxide membrane structure are composited into a novel composite structural gas sensitive material by a magnetron sputtering method, and thus the porous silicon based copper oxide composite structural gas sensors capable of effectively detecting nitrogen oxides at room temperature is manufactured.The gas sensitive material manufactured by the method has high specific surface area and high surface activity and can provide a great deal of adsorption locations and diffusion passages to achieve detection of low-concentration nitrogen oxides at room temperature.The manufacturing method has the advantages of simple equipment, operational convenience, good repeatability, low cost and the like, and has great significance in practice and research. 本发明公开了一种用于室温的多孔硅基氧化铜复合结构气敏元件的制备方法，采用磁控溅射的方法将有序多孔硅与氧化铜薄膜结构复合形成新的复合结构气敏材料，制备出一种可以在室温条件