Anticorrosion grinding agent for integrated circuit

The invention provides an anticorrosion grinding agent for integrated circuit. The anticorrosion grinding agent comprises alumina and an aqueous medium and further comprises 10 to 15 parts of chlorine dioxide, 1 to 5 parts of calcium hydrate, 5 to 10 parts of paraformaldehyde and 1 to 5 parts of oil...

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Bibliographic Details
Main Author YANG BOWEI
Format Patent
LanguageChinese
English
Published 01.06.2016
Subjects
ADHESIVES
CHEMISTRY
DYES
MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE
METALLURGY
MISCELLANEOUS APPLICATIONS OF MATERIALS
MISCELLANEOUS COMPOSITIONS
NATURAL RESINS
PAINTS
POLISHES
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Summary:The invention provides an anticorrosion grinding agent for integrated circuit. The anticorrosion grinding agent comprises alumina and an aqueous medium and further comprises 10 to 15 parts of chlorine dioxide, 1 to 5 parts of calcium hydrate, 5 to 10 parts of paraformaldehyde and 1 to 5 parts of oil removing powder. Compared with the prior art, the anticorrosion grinding agent provided by the invention has the beneficial effect of good anticorrosion performance through addition of chlorine dioxide, calcium hydrate, paraformaldehyde and oil removing powder.
Bibliography:Application Number: CN20141622064