Anticorrosion grinding agent for integrated circuit
The invention provides an anticorrosion grinding agent for integrated circuit. The anticorrosion grinding agent comprises alumina and an aqueous medium and further comprises 10 to 15 parts of chlorine dioxide, 1 to 5 parts of calcium hydrate, 5 to 10 parts of paraformaldehyde and 1 to 5 parts of oil...
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Main Author | |
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Format | Patent |
Language | Chinese English |
Published |
01.06.2016
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Subjects | |
Online Access | Get full text |
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Summary: | The invention provides an anticorrosion grinding agent for integrated circuit. The anticorrosion grinding agent comprises alumina and an aqueous medium and further comprises 10 to 15 parts of chlorine dioxide, 1 to 5 parts of calcium hydrate, 5 to 10 parts of paraformaldehyde and 1 to 5 parts of oil removing powder. Compared with the prior art, the anticorrosion grinding agent provided by the invention has the beneficial effect of good anticorrosion performance through addition of chlorine dioxide, calcium hydrate, paraformaldehyde and oil removing powder. |
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Bibliography: | Application Number: CN20141622064 |