Disc multiple-ring inner S-shaped flexible beam resonant gyro and preparation method thereof

• Main Authors: ZHANG WEIPING, ZHU JIAQIANG, TANG JIAN, XING YALIANG
• Format: Patent
• Language: Chinese; English
• Published: 13.04.2016
• Subjects: GYROSCOPIC INSTRUMENTS; MEASURING; MEASURING DISTANCES, LEVELS OR BEARINGS; NAVIGATION; PHOTOGRAMMETRY OR VIDEOGRAMMETRY; PHYSICS; SURVEYING; TESTING

The invention provides a disc multiple-ring inner S-shaped flexible beam resonance gyro and a preparation method thereof. The disc multiple-ring inner S-shaped flexible beam resonant gyro comprises a substrate, a disc multiple-ring inner S-shaped flexible beam resonator and a group of electrodes dis...