Disc multiple-ring inner S-shaped flexible beam resonant gyro and preparation method thereof

• Main Authors: ZHANG WEIPING, ZHU JIAQIANG, TANG JIAN, XING YALIANG
• Format: Patent
• Language: Chinese; English
• Published: 13.04.2016
• Subjects: GYROSCOPIC INSTRUMENTS; MEASURING; MEASURING DISTANCES, LEVELS OR BEARINGS; NAVIGATION; PHOTOGRAMMETRY OR VIDEOGRAMMETRY; PHYSICS; SURVEYING; TESTING

The invention provides a disc multiple-ring inner S-shaped flexible beam resonance gyro and a preparation method thereof. The disc multiple-ring inner S-shaped flexible beam resonant gyro comprises a substrate, a disc multiple-ring inner S-shaped flexible beam resonator and a group of electrodes distributed at the periphery of the disc multiple-ring inner S-shaped flexible beam resonator, wherein the disc multiple-ring inner S-shaped flexible beam resonator comprises a central cylinder, a plurality of S-shaped flexible beams, a plurality of concentric rings and a plurality of groups of spokes, the central cylinder is connected with the substrate, the concentric rings are connected through a plurality of spokes, two ends of each of the plurality of S-shaped flexible beams are connected with the central cylinder and the inner side of the smallest concentric ring in the plurality of concentric rings, and each of the electrodes is connected with the substrate. The disc multiple-ring inner S-shaped flexible beam r