Multi-wavelength multi-optical axis parallelism detection device and detection method

The invention discloses a multi-wavelength multi-optical axis parallelism detection device and detection method. The multi-wavelength multi-optical axis parallelism detection device includes a first off-axis parabolic reflecting mirror, a first plane reflecting mirror, a first color division mirror,...

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Main Authors ZHOU WEIHU, HAO CHUNYAN, ZHANG ZILI, JI RONGYI, WANG YANQING, YUAN JIANG, WANG GUOMING, LAO DABAO, LIU XIN, DONG DENGFENG, SHI JUNKAI, FAN BAIXING, CUI CHENGJUN
Format Patent
LanguageChinese
English
Published 30.03.2016
Subjects
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
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Abstract The invention discloses a multi-wavelength multi-optical axis parallelism detection device and detection method. The multi-wavelength multi-optical axis parallelism detection device includes a first off-axis parabolic reflecting mirror, a first plane reflecting mirror, a first color division mirror, a first attenuation sheet, a second plane reflecting mirror, a third plane reflecting mirror, a first frequency multiplication crystal, a second color division mirror and a visible light photoelectric detector; the first off-axis parabolic reflecting mirror is used for reflecting a light beam to the first plane reflecting mirror; the first plane reflecting mirror is used for reflecting the light beam to the first color division mirror; and the first color division mirror is used for reflecting a short-wavelength light beam to the first attenuation sheet. With the multi-wavelength multi-optical axis parallelism detection device and detection method adopted, visible short-wavelength infrared band laser beams can be
AbstractList The invention discloses a multi-wavelength multi-optical axis parallelism detection device and detection method. The multi-wavelength multi-optical axis parallelism detection device includes a first off-axis parabolic reflecting mirror, a first plane reflecting mirror, a first color division mirror, a first attenuation sheet, a second plane reflecting mirror, a third plane reflecting mirror, a first frequency multiplication crystal, a second color division mirror and a visible light photoelectric detector; the first off-axis parabolic reflecting mirror is used for reflecting a light beam to the first plane reflecting mirror; the first plane reflecting mirror is used for reflecting the light beam to the first color division mirror; and the first color division mirror is used for reflecting a short-wavelength light beam to the first attenuation sheet. With the multi-wavelength multi-optical axis parallelism detection device and detection method adopted, visible short-wavelength infrared band laser beams can be
Author WANG YANQING
FAN BAIXING
YUAN JIANG
LAO DABAO
WANG GUOMING
HAO CHUNYAN
CUI CHENGJUN
DONG DENGFENG
JI RONGYI
ZHANG ZILI
ZHOU WEIHU
SHI JUNKAI
LIU XIN
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– fullname: WANG GUOMING
– fullname: LAO DABAO
– fullname: LIU XIN
– fullname: DONG DENGFENG
– fullname: SHI JUNKAI
– fullname: FAN BAIXING
– fullname: CUI CHENGJUN
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Snippet The invention discloses a multi-wavelength multi-optical axis parallelism detection device and detection method. The multi-wavelength multi-optical axis...
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SubjectTerms MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
Title Multi-wavelength multi-optical axis parallelism detection device and detection method
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