Multi-wavelength multi-optical axis parallelism detection device and detection method

• Main Authors: ZHOU WEIHU, HAO CHUNYAN, ZHANG ZILI, JI RONGYI, WANG YANQING, YUAN JIANG, WANG GUOMING, LAO DABAO, LIU XIN, DONG DENGFENG, SHI JUNKAI, FAN BAIXING, CUI CHENGJUN
• Format: Patent
• Language: Chinese; English
• Published: 30.03.2016
• Subjects: MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING

The invention discloses a multi-wavelength multi-optical axis parallelism detection device and detection method. The multi-wavelength multi-optical axis parallelism detection device includes a first off-axis parabolic reflecting mirror, a first plane reflecting mirror, a first color division mirror, a first attenuation sheet, a second plane reflecting mirror, a third plane reflecting mirror, a first frequency multiplication crystal, a second color division mirror and a visible light photoelectric detector; the first off-axis parabolic reflecting mirror is used for reflecting a light beam to the first plane reflecting mirror; the first plane reflecting mirror is used for reflecting the light beam to the first color division mirror; and the first color division mirror is used for reflecting a short-wavelength light beam to the first attenuation sheet. With the multi-wavelength multi-optical axis parallelism detection device and detection method adopted, visible short-wavelength infrared band laser beams can be