Pressure sensor using inductance type induction and sensing method

The invention provides a pressure sensor using inductance type induction and a sensing method. The pressure sensor includes an inductor, an inductance digital conversion module, a micro controller module and a reference clock; the inductance digital conversion module further comprises an inductor dr...

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Bibliographic Details
Main Author HUA JINMAO
Format Patent
LanguageChinese
English
Published 23.03.2016
Subjects
MEASURING
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE
PHYSICS
TESTING
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Summary:The invention provides a pressure sensor using inductance type induction and a sensing method. The pressure sensor includes an inductor, an inductance digital conversion module, a micro controller module and a reference clock; the inductance digital conversion module further comprises an inductor driving block, an impedance and inductance measurement module, a threshold value comparator, a high-resolution inductance measuring module, a registration and logic device and a communication interface. According to the pressure sensor using inductance type induction of the invention, pressure is detected through measuring the deformation quantity of a metal strain gauge/film in the inductor adopting an inductance manner, and high-precision measurement (submicron-level) non-contact measurement can be realized. With the pressure sensor of the invention adopted, high-precision measurement can be performed on linear/angular positions, displacement, movement, compression, vibration, metal components and the like. Compare
Bibliography:Application Number: CN201511019219