Heterogeneous junction solar cell, preparation method thereof and surface passivation method

• Main Authors: HE YANRU, XU ZHAN, LI LIWEI, GU SHIBIN, GUO TIE, ZHANG JUAN, WANG QI, TIAN XIAORANG, YANG RONG, ZHANG LIN
• Format: Patent
• Language: English
• Published: 03.02.2016
• Subjects: BASIC ELECTRIC ELEMENTS; CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; SEMICONDUCTOR DEVICES; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE

The invention discloses a heterogeneous junction solar cell, a preparation method thereof and a surface passivation method. An intrinsic layer is fully annealed to enhance a passivation effect. Boron atoms in a doped layer P layer are prevented from diffusion. The cell conversion efficiency and the battery performance are enhanced. The heterogeneous junction solar cell surface passivation method comprises the steps that a first intrinsic layer I layer is deposited on the surface of the first side of a crystal silicon sheet; the first intrinsic layer I layer is annealed; and the doped layer P layer is deposited on the surface of the annealed first intrinsic layer I layer.