In2O3-based hotline type semiconductor gas sensor with environment temperature and humidity self-compensation capabilities

• Main Authors: PENG WEI, ZHAN ZILI, CHEN KECHENG, CHEN ZHIQIANG, YAN HEYAN
• Format: Patent
• Language: English
• Published: 03.02.2016
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

The invention belongs to the technical field of gas sensors and particularly discloses an In2O3-based hotline type semiconductor gas sensor with environment temperature and humidity self-compensation capabilities. The gas sensor comprises a sensitive element and a compensation element, and is characterized in that a sensitive material of the sensitive element is In2O3 added with noble metal; a compensation material of the compensation element is In2O3 added with noble metal and doped with X, wherein X is at least one of Zn, Cu, Si, Al, Ca and Mg; and the noble metal of the sensitive material and the compensation material is at least one of Pd and Pt. According to the In2O3-based hotline type semiconductor gas sensor, the In2O3 added with the noble metal is used as the sensitive material and the specific resistance of the material is increased by doping in the In2O3 and the material is used as the compensation material, so that the composition, structure, and color and the like of the compensation material and the sensitive material are the same; and the sensitive material and the compensation material have same moisture absorption and heat transferring performances and self compensation of the changes of environment temperature and humidity is realized.