Large-aperture ultra-precise grinding machine integrated system

• Main Authors: SUN LIJIAN, JIANG ZHENHUA, PENG CHENG, HONG HAIBO, YIN YUEHONG, WANG QIANREN, REN MINGJUN
• Format: Patent
• Language: English
• Published: 03.02.2016
• Subjects: DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS; GRINDING; MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; PERFORMING OPERATIONS; POLISHING; TRANSPORTING

The invention discloses a large-aperture ultra-precise grinding machine integrated system. The large-aperture ultra-precise grinding machine integrated system comprises a Z-axis spindle box and an auxiliary two-dimension vibration laser scanning in-situ detection system which is detachably connected to the Z-axis spindle box; the auxiliary two-dimension vibration laser scanning in-situ detection system comprises a follow-up guide way, an X-axis guide way and follow-up guide way connecting parts which are matched and connected with the follow-up guide way; the follow-up guide way is parallel to the X-axis guide way and can slide back and forth in the direction of the X-axis guide way, and the follow-up guide way connecting parts keep still in the direction of an X axis. The large-aperture ultra-precise grinding machine integrated system further comprises an in-situ grinding wheel dressing device which can achieve in-situ automatic dressing of a cambered surface grinding wheel. The large-aperture ultra-precise grinding machine integrated system is an ultra-precise optical grinding machine which combines machining, detection and dressing and is oriented to large-aperture optical mirrors, a non-contact sensor is applied to the large-aperture optical mirror grinding machine, the detection efficiency and the machining efficiency can be greatly improved, and the errors caused during carrying of detected elements are reduced to the hilt.