SUPER JUNCTION SEMICONDUCTOR DEVICE

Provided is a super junction semiconductor device. The super junction semiconductor device includes a vertical pillar region located in an active region and horizontal pillar regions located in a termination region that are connected with each other while simultaneously not floating the entire pilla...

Full description

Saved in:
Bibliographic Details
Main Authors HYUK WOO, CHOI, CHANG YONG, KIM, DAE BYUNG, CHO, MOON SOO, JUN, KWANG YEON, KWON, SOON TAK, KANG, KI TAE
Format Patent
LanguageEnglish
Published 27.01.2016
Subjects
Online AccessGet full text

Cover

Loading…
More Information
Summary:Provided is a super junction semiconductor device. The super junction semiconductor device includes a vertical pillar region located in an active region and horizontal pillar regions located in a termination region that are connected with each other while simultaneously not floating the entire pillar region in the termination region. Thus, a charge compensation difference, generated among pillar regions, is caused to be offset, although the length of the termination region is relatively short.
Bibliography:Application Number: CN201510412322