SUPER JUNCTION SEMICONDUCTOR DEVICE
Provided is a super junction semiconductor device. The super junction semiconductor device includes a vertical pillar region located in an active region and horizontal pillar regions located in a termination region that are connected with each other while simultaneously not floating the entire pilla...
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Main Authors | , , , , , , |
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Format | Patent |
Language | English |
Published |
27.01.2016
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Subjects | |
Online Access | Get full text |
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Summary: | Provided is a super junction semiconductor device. The super junction semiconductor device includes a vertical pillar region located in an active region and horizontal pillar regions located in a termination region that are connected with each other while simultaneously not floating the entire pillar region in the termination region. Thus, a charge compensation difference, generated among pillar regions, is caused to be offset, although the length of the termination region is relatively short. |
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Bibliography: | Application Number: CN201510412322 |