Synthetic silicon oxynitride raw material and preparation method thereof

• Main Authors: NIE JIANHUA, WEN JIN, YIN YUCHENG, CAI MANFEI, ZHANG HAN, LIANG YONGHE, ZHANG GUOYAN, QIU WENDONG
• Format: Patent
• Language: English
• Published: 20.01.2016
• Subjects: CHEMISTRY; COMPOUNDS THEREOF; INORGANIC CHEMISTRY; METALLURGY; NON-METALLIC ELEMENTS

The invention relates to a synthetic silicon oxynitride raw material and a preparation method thereof. A technical scheme adopted in the invention is characterized in that the method comprises the following steps: mixing 50-60wt% of elemental silicon with 40-50wt% of silica, and carrying out ball mi...