Synthetic silicon oxynitride raw material and preparation method thereof
The invention relates to a synthetic silicon oxynitride raw material and a preparation method thereof. A technical scheme adopted in the invention is characterized in that the method comprises the following steps: mixing 50-60wt% of elemental silicon with 40-50wt% of silica, and carrying out ball mi...
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Main Authors | , , , , , , , |
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Format | Patent |
Language | English |
Published |
20.01.2016
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Subjects | |
Online Access | Get full text |
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