Synthetic silicon oxynitride raw material and preparation method thereof

The invention relates to a synthetic silicon oxynitride raw material and a preparation method thereof. A technical scheme adopted in the invention is characterized in that the method comprises the following steps: mixing 50-60wt% of elemental silicon with 40-50wt% of silica, and carrying out ball mi...

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Main Authors NIE JIANHUA, WEN JIN, YIN YUCHENG, CAI MANFEI, ZHANG HAN, LIANG YONGHE, ZHANG GUOYAN, QIU WENDONG
Format Patent
LanguageEnglish
Published 20.01.2016
Subjects
CHEMISTRY
COMPOUNDS THEREOF
INORGANIC CHEMISTRY
METALLURGY
NON-METALLIC ELEMENTS
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Summary:The invention relates to a synthetic silicon oxynitride raw material and a preparation method thereof. A technical scheme adopted in the invention is characterized in that the method comprises the following steps: mixing 50-60wt% of elemental silicon with 40-50wt% of silica, and carrying out ball milling in a ball mill until the granularity is 4.5-6.5[mu]m to obtain a ball milled powder; and putting the ball milled powder in an atmosphere furnace, heating in highly pure nitrogen atmosphere at a heating rate of 10-12DEG C/min to 1000-1100DEG C, heating at a heating rate of 6-8DEG C/min to 1400-1500DEG C, and carrying out heat insulation for 4-9h to obtain the synthetic silicon oxynitride raw material. The method has the advantages simplicity, short production period, low cost, and no need of special synthesis devices or processing technologies; and the prepared synthetic silicon oxynitride raw material has the characteristic of high Si2N2O purity and completeness of grown crystal grains.
Bibliography:Application Number: CN20151601922