Synthetic silicon oxynitride raw material and preparation method thereof
The invention relates to a synthetic silicon oxynitride raw material and a preparation method thereof. A technical scheme adopted in the invention is characterized in that the method comprises the following steps: mixing 50-60wt% of elemental silicon with 40-50wt% of silica, and carrying out ball mi...
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Main Authors | , , , , , , , |
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Format | Patent |
Language | English |
Published |
20.01.2016
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Subjects | |
Online Access | Get full text |
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Summary: | The invention relates to a synthetic silicon oxynitride raw material and a preparation method thereof. A technical scheme adopted in the invention is characterized in that the method comprises the following steps: mixing 50-60wt% of elemental silicon with 40-50wt% of silica, and carrying out ball milling in a ball mill until the granularity is 4.5-6.5[mu]m to obtain a ball milled powder; and putting the ball milled powder in an atmosphere furnace, heating in highly pure nitrogen atmosphere at a heating rate of 10-12DEG C/min to 1000-1100DEG C, heating at a heating rate of 6-8DEG C/min to 1400-1500DEG C, and carrying out heat insulation for 4-9h to obtain the synthetic silicon oxynitride raw material. The method has the advantages simplicity, short production period, low cost, and no need of special synthesis devices or processing technologies; and the prepared synthetic silicon oxynitride raw material has the characteristic of high Si2N2O purity and completeness of grown crystal grains. |
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Bibliography: | Application Number: CN20151601922 |