Device automatically removing blockage of waste liquid discharge pipe

• Main Authors: MEN ENGUO, WANG JIZHOU
• Format: Patent
• Language: English
• Published: 23.12.2015
• Subjects: BLASTING; CLEANING; CLEANING IN GENERAL; ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS; HEATING; JOINTS OR FITTINGS FOR PIPES; LIGHTING; MEANS FOR THERMAL INSULATION IN GENERAL; MECHANICAL ENGINEERING; PERFORMING OPERATIONS; PIPES; PREVENTION OF FOULING IN GENERAL; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; THERMAL INSULATION IN GENERAL; TRANSPORTING; WEAPONS

The invention relates to a discharge device for waste liquid in a semiconductor production process, and specifically relates to a device automatically removing blockage of a waste liquid discharge pipe. The device comprises a waste liquid collecting box, a cleaning fluid supply pump, a cleaning fluid control valve, a cleaning fluid tank, a waste liquid drain box, a drain control valve, a waste liquid collecting tank, and a cleaning effluent collecting tank. One inlet of the waste liquid collecting box is communicated with the cleaning fluid supply pump, the cleaning fluid control valve, and the cleaning fluid tank in sequence, and the other inlet is provided with a waste liquid collecting box sealing baffle which can be opened and closed. The outlet of the waste liquid collecting box is communicated with the inlet of the waste liquid collecting box through a waste liquid discharge pipe. One outlet of the waste liquid drain box is provided with a waste liquid drain box sealing baffle which can be opened and closed, and the other outlet is communicated with the drain control valve. The cleaning fluid in the cleaning fluid tank is collected by the cleaning effluent collecting tank. Waste liquid is collected by the waste liquid collecting tank. The device can automatically clean the waste liquid discharge pipe, preventing the pipe from being blocked, and the pipe does not need to be dismounted to clean, and working time is saved.