Surface-potential distribution measuring device

A surface-potential distribution measuring device (70) is provided with a laser light source (13), a Pockels crystal (11) with a taper, a mirror, a photodetector (16) that detects the light intensity of laser light reflected by the mirror, a holding and mounting part (30) that holds and moves the Po...

Full description

Saved in:
Bibliographic Details
Main Authors IKEDA HISATOSHI, FURUKAWA MASAAKI, KUMADA AKIKO, YOSHIMITSU TETSUO, HIDAKA KUNIHIKO, TSUBOI YUICHI
Format Patent
LanguageEnglish
Published 25.11.2015
Subjects
Online AccessGet full text

Cover

Loading…