Surface-potential distribution measuring device

A surface-potential distribution measuring device (70) is provided with a laser light source (13), a Pockels crystal (11) with a taper, a mirror, a photodetector (16) that detects the light intensity of laser light reflected by the mirror, a holding and mounting part (30) that holds and moves the Po...

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Bibliographic Details
Main Authors IKEDA HISATOSHI, FURUKAWA MASAAKI, KUMADA AKIKO, YOSHIMITSU TETSUO, HIDAKA KUNIHIKO, TSUBOI YUICHI
Format Patent
LanguageEnglish
Published 25.11.2015
Subjects
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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Summary:A surface-potential distribution measuring device (70) is provided with a laser light source (13), a Pockels crystal (11) with a taper, a mirror, a photodetector (16) that detects the light intensity of laser light reflected by the mirror, a holding and mounting part (30) that holds and moves the Pockels crystal (11), a voltage correction database, and a computation unit that identifies an input voltage corresponding to a testing output voltage as the surface potential of an electric-field-reduction system (3). The Pockels crystal (11) is formed such that the cross-sectional size thereof varies in the axial direction. The holding and mounting part (30) has a protection part (31) for protecting the structure of the Pockels crystal (11), movement parts (35, 36) for moving the Pockels crystal (11) for the purpose of measuring the surface potential of the electric-field-reduction system (3), and a drive control unit (37) for controlling the movement parts (35, 36).
Bibliography:Application Number: CN201380074773