Surface damage detection device and method of larger-diameter optical element

• Main Authors: CHEN XIN, TANG SHUNXING, JIANG XIUQING, LIU YAQUN, ZHU BAOQIANG, GUO YAJING
• Format: Patent
• Language: English
• Published: 11.11.2015
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

The invention provides a surface damage detection device and method of a larger-diameter optical element. The device comprises a lighting light source, a large diameter optical element seat, an imaging lens, a two dimensional galvanometer, a CCD camera and a computer. Scanning of different positions of the optical element is realized by using a method of detecting surface damage of the optical element with a galvanometer scanning manner without moving the element to be moved in space, massive space is saved, and a detection system is simple in structure and easy to integrate. The surface damage detection device and method of the larger-diameter optical element based on the galvanometer scanning manner can realize the scanning collection of damage images of different positions of the large-diameter element, splicing is performed to obtain an integral damage image of the large-diameter element, and the method has low resolution demand on CCD, and is simple in splicing manner and capable of fast finishing detection of damage of the large-diameter element.