Surface defect detection system and surface defect detection method

The invention discloses a surface defect detection system and a surface defect detection method. The detection system comprises a detection object, a support platform for bearing the detection object, and a detection device, wherein the detection device comprises an illuminating system, an objective...

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Bibliographic Details
Main Authors LI XUELAI, LI ZHIDAN, ZHANG JUN
Format Patent
LanguageEnglish
Published 14.10.2015
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Summary:The invention discloses a surface defect detection system and a surface defect detection method. The detection system comprises a detection object, a support platform for bearing the detection object, and a detection device, wherein the detection device comprises an illuminating system, an objective lens, an image detector and a main control computer. The surface defect detection system is characterized in that the support platform is rotary; the objective lens is on a linear movement guide rail which is positioned on the rotary support platform. According to the device, the complexity of a motion platform is lowered, the equipment volume is reduced, meanwhile, the cost is lowered and the yield is increased.
Bibliography:Application Number: CN20141137051