Intelligent energy-saving thin film doped with nano-composite embedded structure and preparation method thereof

• Main Author: ZHU HUIQUN
• Format: Patent
• Language: English
• Published: 07.10.2015
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The invention discloses an intelligent energy-saving thin film doped with a nano-composite embedded structure and a preparation method thereof. The intelligent energy-saving thin film comprises a glass substrate, a ZnO embedded layer and an insert, wherein the ZnO embedded layer is attached on the glass substrate; the insert is arranged in the ZnO embedded layer; the insert is VO2. A high-purity doped source W (or Mo, Nb, Ta and Ru elements) is arranged on a VO2 target and a heterogeneous composite layer ZnO with a suitable thickness is introduced into the glass substrate; the synergistic effect of W doping, a nano structure and ZnO heterogeneous compounding is realized in a process of depositing a VO2 thin film to form the VO2 intelligent energy-saving thin film doped with the nano-composite embedded structure. The infrared (and electrical) modulation amplitude is improved, the phase change temperature of the thin film and the heat-stagnation curve width are reduced, the thermochromism performance and the infrared regulating and controlling efficiency of the VO2 thin film are improved, and the application potential of the thin film in an intelligent window thin film is improved.