High-efficiency liquid metal cooling method and device of discharge electrode of EUV source

• Main Authors: SONG YUAN, LU QIPENG, WANG YI, GONG XUEPENG
• Format: Patent
• Language: English
• Published: 23.09.2015
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

The invention relates to a high-efficiency liquid metal cooling method and device of a discharge electrode of an EUV source, belongs to the field of cooling of high-temperature heating devices, and aims at solving the problems that in the prior art the whole set of water cooling device is relatively large and damages the EUV source. The discharge electrode of the EUV source is mounted on a heat radiation substrate, a cladding pipeline is mounted in the heat radiation substrate in a totally enclosed mode, liquid metal is input to the cladding pipeline, and the heat radiation substrate is separated from an electric fan by a thermal insulation board. An electromagnetic pump drives circulated flow of the liquid metal via an electromagnetic field, the fan carries out heat radiation on the liquid metal in a severe convection manner, heat is exhausted out of the source, and the whole cooling process is completed. According to the high-efficiency liquid metal cooling method and device, the size of a cooling system is reduced, mechanical vibration of the system is reduced, and the service life of the discharge electrode is prolonged.