Etchant composition for a metal layer comprising phosphorous acid

The invention relates an etchant composition for a metal layer comprising phosphorous acid. The etchant composition can adjust the inclination of an inclined etching surface without slowing etching speed even no environment management substance is contained, and an etching solution with ageing stabi...

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Bibliographic Details
Main Authors YU IN-HO, KUK IN-SEOL
Format Patent
LanguageEnglish
Published 16.09.2015
Subjects
CHEMICAL SURFACE TREATMENT
CHEMISTRY
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING MATERIAL WITH METALLIC MATERIAL
COATING METALLIC MATERIAL
DIFFUSION TREATMENT OF METALLIC MATERIAL
INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL
METALLURGY
MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLICMATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASSC23 AND AT LEAST ONEPROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE
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Summary:The invention relates an etchant composition for a metal layer comprising phosphorous acid. The etchant composition can adjust the inclination of an inclined etching surface without slowing etching speed even no environment management substance is contained, and an etching solution with ageing stability is provided.
Bibliography:Application Number: CN201510111813