NANOTUBE STRUCTURE BASED METAL DAMASCENE PROCESS
In various embodiments, a method for manufacturing a metallization layer on a substrate is provided, wherein the method may include forming a plurality of groups of nanotubes over a substrate, wherein the groups of nanotubes may be arranged such that a portion of the substrate is exposed and forming...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
05.08.2015
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Subjects | |
Online Access | Get full text |
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Summary: | In various embodiments, a method for manufacturing a metallization layer on a substrate is provided, wherein the method may include forming a plurality of groups of nanotubes over a substrate, wherein the groups of nanotubes may be arranged such that a portion of the substrate is exposed and forming metal over the exposed portion of the substrate between the plurality of groups of nanotubes. |
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Bibliography: | Application Number: CN201510050079 |