Transparent-conductive-film laminate, manufacturing method therefor, thin-film solar cell, and manufacturing method therefor

• Main Authors: SOGABE KENTARO, YAMANOBE YASUNORI, MATSUMURA FUMIHIKO
• Format: Patent
• Language: English
• Published: 15.07.2015
• Subjects: BASIC ELECTRIC ELEMENTS; CABLES; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; CONDUCTORS; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; INSULATORS; LAYERED PRODUCTS; LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT ORNON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM; METALLURGY; PERFORMING OPERATIONS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING ORDIELECTRIC PROPERTIES; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TRANSPORTING

Provided is a transparent-conductive-film laminate that exhibits a superb optical confinement effect, has a textured structure that exhibits superb light-scattering performance, and is useful as a surface electrode when manufacturing a high-efficiency silicon thin-film solar cell. Also provided are a method for manufacturing said transparent-conductive-film laminate, a thin-film solar cell using said transparent-conductive-film laminate, and a method for manufacturing said thin-film solar cell. This transparent-conductive-film laminate is provided with an iridium-oxide transparent conductive film (I) that is 10-300 nm thick and a zinc-oxide transparent conductive film (II) that is at least 200 nm thick. The surface of the transparent-conductive-film laminate consists of a crystalline structure that has both concavities and convexities, and the transparent-conductive-film laminate has a surface roughness (Ra) of at least 30 nm, a haze percentage of at least 8%, and a sheet resistance of at most 30 Omega/sq.