Cavity protection and monitoring device for vacuum coating production line

• Main Authors: JIANG HONG, GU TIANQI, WANG HAILIN, YU TAO, PENG SHOU, ZHAO YONG, GUAN MIN, HUI JIANQIU, YANG LIHONG, WEI XIAOJUN
• Format: Patent
• Language: English
• Published: 10.06.2015
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

The invention discloses a cavity protection and monitoring device for a vacuum coating production line. The device comprises a curtain board, a seal ring, a quick release connector, a magnetofluid sealing piece, a clamping ring, a handle, a stop dog, a steel cable baffle ring, a windscreen, a seal ring, observation glass, a rubber gasket and a flange cover, wherein a first protection structure consists of the steel cable baffle ring, the windscreen, the seal ring, the observation glass, the rubber gasket and the flange cover, and a second protection structure consists of the curtain board, the seal ring, the quick lease connector, the magnetofluid sealing piece, the clamping ring, the handle and the stop dog. According to the cavity protection and monitoring device for the vacuum coating production line provided by the invention, by adopting a dual protection structure, the windscreen is placed in an inner cavity of the cavity protection and monitoring device, an interval is formed to form a first protection between the observation glass and the vacuum cavity; furthermore, the curtain board is placed in a vacuum cavity to shield a viewport of the cavity protection and monitoring device, so as to form a second protection.